High-NA EUV (TWINSCAN EXE)
Active
ASML
Overview
The 0.55 NA anamorphic-optics scanners for sub-2nm chipmaking — at ~$380M each, the most expensive production tools ever built. The production-grade EXE:5200B (175 wafers/hour, ~60% faster than the EXE:5000) installed at Intel in Q4 2025 for the 14A node; Samsung, SK hynix, TSMC, and imec hold the rest of a worldwide fleet still under a dozen systems.
Early production ramp: Intel 14A risk production 2027 is the first insertion; ~10 High-NA deliveries planned in 2027; TSMC adopts at A14 (~2028)