DUV Lithography (TWINSCAN NXT)

Overview

Deep-ultraviolet immersion and dry scanners — the workhorses that pattern the large majority of layers on every chip made, from leading-edge logic to mature automotive nodes. The flagship NXT:2100i immersion system runs 295 wafers per hour; 279 DUV systems were recognized in 2025.

Shipping at scale; China DUV sales and servicing are the focus of proposed new US restrictions

Key Specs